89page

82 rll 3d: +ll oltr1 =+ 8l 1tr 7lE=d 1. fl47= flz}+=9 azlE_Bg *xI4 6dzlE. +C€ "44 "+g Eel4^Ir. 9l= dzlel r- +ls(4, Shell)E 'lu}.ll-l 91trI. [=? 3-1]E flz]g€9 gg$.ol +Aqa fl zl"J Hls.;15 s.+6}q Be EAql^.i €al zlzl 944 €tlg €Ha}tsrll =-Al zl € arl *+. + zI9 flzlzl ,*= *zlq+ dz}9 izl +g q €zlE {zllgtr +Coltr}. +rJ 619 Eq ,& +]s.dzlf9 +++ flzlE g*gE_ 4drl zJ4 "lel Aol Erld€ flzlE ol$sl flzL +e ol9"l4 6.J+. flx}g E.4 Elq4e cee ql +B ael4 dz}9 +ql u+BI aAqq, r}4^l ael4 dzlE flzlel 9B,rilZlE gl= jtr* q +E 6J+ "i^l+71 ag s_E flzIts +czlel dz}9 ++= *z{S.ol +g.J flaol{ "}z}f zl ae ul olsEl flzIts _ E _ + ae +E dzlE * =trI. ol fl 4+ += ae "l r.I+E +CzI +"l+. ol+ ?ol %tz} += As+ GBzlizl ral 3-1 dal= fl^l += flx}=g t-+l gA4 sJtrI. t9'9lzl4l =q Bg ElqrzlEol 'Js.z| r-1=l 4= €ez1 E4zl, Elqlzlss frrl + +cg zlrl4= Ag ga6}al gzl ,JEE zl?gs +^L+ ceg +q,H= tl i=g 6}+el = o -tr _ HoI <-tr 3-1>r+ zJ9_ aA& S.= "J=g+. izlS-tr'9 4+Ee dEa+ql =A6Iq zlCqflsq izlgs.E.+EJ Hls.^1g. Hl*+ 9zl zlzl EeE ceg "J + 91tr1. s.E flzlqlE 4.zlzl d+B + 9l= +{lE7} gleq .++ zlzt* +lEgf* +g +9 dz}E 4=Eil izlg-s.= ol q+ fl21"4 +91e-l dzlulgg =48 "lq "J= aol+. flz}g +JEE "++ zlrl* +l
89page

1. 원자구조
89page

1. 원자구조
89page

제1절 기초물성
89page

1. 원자구조
89page

제1절 기초물성
89page

제 3 장 웨이퍼 증착