159page

L52 UJE^ll EPlxlil 8cl 6tltr ol _ Q _ o /\I = 6H Phosphorus(P) E= u}"l54 rcTl+ql^.] !_E qlr,lEl +t}ql 4ol= N€ E'JE. Phosphorus Oxychloride(POCls ) d4=g "JgE_ E€.J "ll €e_s 2tol= "l;I. Photo Resist ++C fzlE "J6Iq +€ € Bg Polyrner, Solvent, Sensitizer-e 4trqq €+q= €EIql ,t+?+ "JCr+ gC -e--a +=+. "JC ql a += Sensitizer4l I dlq .A zl 9l zlq SC e A += Polymer4l 9 allr.l 54 zlgl d+. pl ,l4 panern$ !-zl I a]] rl = "-}ol S;. t"J 6}r, pin Horeol 9ll 'J=rcol +sq 'Hdc"l €l zleld E ql ']J all zlEzl +olo} +4. Photoresist, PR ellolElq a6I^J uti-z$ Esll +E +g Hql ]==^l 7)= a+"+. r==€ pRg q€ ;<lqg qlil6]-E+ PR rlEJg €tI*4ql^-l blaq. Planar Structure E"J rJEql^J dEr+ +t, r4r tI+E ulz.zJ os "Js= tJE 4zlAz.. 7=E vJECg pR=.Cql +4 6I+. PLCC Plastic Leaded Chip Carrier PN Junction, PAId * Aa!lql^] ae_ ,J*es dE6|= pzlqr+ ae_ dzl E dE6L= Nzlq r+el d E. PNP _ E _ = ' u}"l=zl E{zl^Elql }ol=, Fzl9 p;<lEql N €9ol Zqgl= EJs.;144A=. Positive Resist, *C PR qg *BJe +Ee *z)t, qg Ee +Ee €+ql^'l 4)7)9= PR. pl..z9 "Js+zI €tt *4ql^] €c€+. AZ _ t3s0o) *C pnolr*. Polycrystalline Silicon(Poly) Y+e 44ea +C€ d4=. 44 d4=e 94 q4 4 €4="-s "J=+. 54= qlvl= ri+ g4 Ll+ zl€o _ e _ 4+6IE "J=qzlr(EE4ola *€ola), t EI=ol 4?alE "J=q Tl+. Predepo sition(Predep) 46Irl "JE EyJETI Hls.;1 Aaql E9z}ts *4. Probe test ,J^Iql^l ,,Ia€ wAFERE 4zl4 +C "t ++ tI4= El?(probe)S ^I+6ll^l zJ,rla|{ .J++ E*+g ++ alr Eel*ql 4al] RepairTl+ q+= +8, g.q^l 4.2) 4 *H"l'l respR-e- Repair6}= WAFER TEST*4.: EDS(Electrical Die Sorting) 4.214 iz} E+.