150page

UJE^ll Eol^lat 8q 6tls L43 -e. o ol /\{ = 6l| Alloy HI=:1 *Aql^] "Jsol .EJg Hls.:1g1 :z tr= Ee E ^ .i e **tlA :z ;.1-olql z]olc =qE= €c++. Aluminum / Al Hls.;1 rzlql^] ilq 1 +.2y3 €a6}=r1 zl* r*"1 2!ol= A+. _ H-F =+sE 4+€tr1. Angle Lap +zlql^l q€ 4Ee ++, d'JE 4olE +Ell6I= HlB. Angstrom zJ"l9 +gl, I €-r-E+g qlEE I trIolzEolr}. Anneal elol99 *qg =q izlqlel s.E €6;01 5.E$ u1 zl"Jgg alE l$i4. Antimony uJs;1q],t1 N€ Dopant?J s+ fla. E]4=(BURTED)? eJ Dopanttr-E 2rtl+. APCVD tl$s-l HI+ *zl ']] ql Ef,+ g qlLJ zlql E o.J EI+ HI+g ol*, qlEg ++6I= BBol4. Arsenic/As EllS? €CE 4szldql 2lol= N€ Dopant. Back grinding +1"19 AEE gg,q+ "+g alzjall geolttee_ ; 4+ AEg 4olLflq z16}9 =olr gdEgg 6"rtl^l 7l= *e. Bake 4+rz] Eg. + gql #= a-o-E etchLi developrl ,J* Slel d +e g +71^1717) 9l *ql rll hard bake4 soft bakezl 9l+. Base 1. NPN 49 PttP E-Azl^Elel 4E 2. NpN e dzl^Elg tsilol^+ +yJ qlulEl P ==lEl, zlo} = .g €C g),lL --l t:. = HH E -ru. pNp = nxl^El E 6].= Bg 'A= P€ Bwam lead Hls.;1 e zl*zl4 HIpE -H-F # o -a EJ= 4 + E+ 4 _ = . ilel 7)A14, 4.2)4 ='llE= €ca}=rii 2a"J+. Bipolar Transistor qlulEl, HIol^, =4El _ tr _ TCgq, qltrlElql gatl Hlol ^ -E =q-s= a+ tI*xI9 +"J+ =4Elql E+ 4 f tlfz}9 d+ql 9atl F46l= .trdzl^ul. a ++ z= 4r-I.}zl flall NpN .q9 ppp -Edzl:ul4l E 4+trI. Blade dicing4lrl ^I+6}= Ef-s Ni g+ql diamond grtTl qL e 9l+. scribe lane9 +ql 44 uuae9 #7171 B+d 4. (: diamond wheel)