133page

126 ^135 e{ ot u] = + 2.9=ol =tr+q EE 4^l . -2-EL zil +4, "Jsol p qBts *eol E.+zl gE +lolgtrg az}= zlttr 'tl --t --'I o '-l r os +d6}al €q. +ll olvl zl 4ol9s* =ilzl^El+ zJg az1"Jg E+g a+ql = 5rd+Eel ez}5"l al zlt9 Bsia}tszlE zJ.rlalE 49 *ol+ 49olrI. 6}Zl"J _H_+ +++ 444=-zy +C€ A+ql= EIE _ = .+ql €6"1€- El'l= 4ol_q E, xl oJ, e {zl - el Eg H}=rl zj r}allo} ++. ol eJ r+a q ^l c =.ol .JE+ 4ol (die)9 izl 41 zig elolEl= q7l^l zJ4.6};(l"J ol ,J^L Eal= ala?+oJql^-l uj 98 +lolul= 94 7J^I6} + 914= d qql += +dE 91trI. +, ^lerrl+ rz}= 4e6l dq *ee.r{l ,il=*e E+ql g^J6}= q7l zlzl HE}= +46}= z)s zl9" 6}+. el= 5q Ulol^ zlalaig rJol= ol+61tr e{xl }el Eilol^qlel +A*E E += 'J +E glsq ole+rl €zI ala*ol e{zl :-rl$ ol+9 H+^l 7J +E gl4. +rJ _e.{zl^ElE ol+g el+g + ?leeE = E4lE EIE}g z}Ecol gl= E ,Id9 rld ra6I= 7)e zlta}4. oJEoJ *A+E s.er;^L= gd.a^-zse+ af E _ E g rr (hand probe)E ,r.|galzlE 6l= Eil "J HI4 .J +ll ol € "J 4 + [:z B 3-38]r+ zJol 1zl u]= +Eq rz}= ,J ^I+tr}. ol = el ol vl d;il E E6rl +EI+= *e+E E+= oJzl el+ 4o14. 3. =-d -ts e(scratch protection) fl#rl9 ++E+ +qI4 eEe-E+el +ll olg= _ H-Ed}= *B o-sts t+E ++ g 5+ 9l+. tlElE 6+0l gU +q= tE++ d++(bonding pad)9l4lrl B4rl zltsr]l olez,rl aEil 4 "l rtl+ =ulz} $_r€tr}. 4. A trJ xl al(backside preparation) "Ie= iI+ *Aq qlHl6}q ql olgg aEql +gg allot g 4*zl iltsr] ilrj *Be =zl + zlz)e +E + 9l+. 71. 9l o f (backstde tapping) 4zl4 SCql E€6Jg += +t"+g 4l4i;l7l g6I^J +lolul aHg €"IaI€ ell olE9 +r{= g}rll 6}q r}olB4(die separation)zl +ol6}E+ 6}tr, i}+el a+ ++ql rI.J =El= 6I= +A r= 3-38 +lloltrle.l E -E-o{ o{ JJ-E- Ci _I ++ + ++
133page

2. 알로이 공정후의 표본검사
133page

3. 굵힘 보호
133page

4. 뒷면처리
133page

2. 알로이 공정후의 표본검사
133page

3. 굵힘 보호
133page

4. 뒷면처리
133page

4. 뒷면처리
133page

3. 굵힘 보호
133page

2. 알로이 공정후의 표본검사