115page

108 ^1135 ellolsl =4r +4 ql E slq zl:zl "l9El(ionization)94. oJ q E "lg+€ zlL=. eI*C ol u}] + zlalz) q+ql 4?+7)(etching species)E ^I+gq "l a9 tr}€-44 zJol +ElE + el+. e*CFa --- CFs+F+Ze - CFa . - Ctrs+F -- CFz+F "le+ aol "Jc€ 4zJzl= +g^lr+ TJol ^l4g tr+"+E €zlE4 HI*6Lq elg C +o.JEg CCalEr] zl4ol .l6}€trI. SiOz+(F)-SiFa+Oz+Fz ol "il cc€ +l"Jc El'Jgg Tl*€sql 9all H+qE- HI=^l z)e-a aAl 4lz]g + 9l+. gql^l t#+ ')+ 4ol +^l^l4ql^l = = 'HJ.J rl4ol ol+qzl= HIE a444ql glq^.1= E*6J "t Hl=o.*6}^14(aniso_tropic etching)9 a€ol 9- a E 7lts6}q ol ag E^l6IE [:B 3-23]+ 'Jol S.€g+. ole+ ?"1 4z+9= €EllE aag dz}9 ,+il214 4?+7lE Tl:-g z*altlA s.g 4sE *+EJs_a4 Ca€ + 91trI. (a) zl.J 4 4€ (b) +4 44€ r= 3-23 ^l:Bt ^.|4-d "J +^l {4E 3. a[-+=+ =tr 71. al+=+ 0l= ElqL++ +;<](CVD)+ [:zB s-24]+ 4"1 +Ael e!*zli{Eg e]**zl +ql A) + +"J6lE^] 4A6J 449= fr^lrl4+tr rifl+E Eaol ^J€qq z\*allz} aI = 5-il glql .{q *ol2l ++q= €t}g ol+6}q H}s.;1 7}**4.ll g.q+ ge I Eg +l olul glql ++^l7l= +;<l ol+.
115page

3. 화학증착공정
115page

3. 화학증착공정
115page

3. 화학증착공정