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102 ^{38 ell ol sl = 4' tEl"-lol q+ c+6I71 gldlrl= d43ol oza oJ6Iq ol$alz-lu| +g ozzl d 4=o _ =- "lE99"t ++.dzl-g t:23 3-181+ ?ol Ozzl tI4"+ Etsql sH](a)9 q, Se t+"+g Edlq +t(b)€ +9, d4=4 H]*(c)S 6Iq, tlEl"-l"l ^JC€ +. aTlql= tlEl"-l"l ^lZI+ gEE +7lq +4 B46l d€4(Linear)eE €zlz'J rJ. rel* tg+"+ol +4$leql 44 OzzI tEI"+g E6lq +tI, HI+6I=Ell rlzlol Bol i,q_6}Zl EgE tlElE C[L+E= q+ LATI+. T=R y't T= t++ +4lolq, Rg c^Je}Stlfol 4, t= rlzlol4. rltol ?zlEr.I "+r+ alEI"+ E C^J4s= ?la1q, HI*++ R€- eEe+ +r4l 67I+r+. [t- ? 3-19]= Oz4l Efl+ t+ E CtL +dolq, 1200tclql^l 7000tAlE t} E+"+g ^A*\7l'71 flsl^-l= "+ 10^lAol ,Jil trI. "JEql d4*ol e00tCl-1200[C] 9s. H $lql^l iGzl tlE{ql :==ol qE HrO Ez}E H-+ OH- olggE +4€+. 1I+EE F6Iq OH- olg-g OrEtrI trl+ uul=.Zl +aI€+. ol e+ ?"1 =4* B46IH d4= tEI"+g 7t g ^lA .llql +44, ^d+++. trtr){ol4 DRy Oz (100)eloltl 2 1000- 1200 c.i45 0.1 1.0 10 100 tlslE C ^Jrl<I(hr.) 3-1e Oz tal"J dg =g+c I E F uF E' ,lot ? ol 0.01 -r al tirlE AalQlr,) uf. 4E4tr (1) ult- z)(masking) s.4 tElEg E+E. +t(impurity diffusion) *rJ^l dq4 0s ul.:zg .J + 9l+. ol = olg +"J "l -r.* +t*eql^l Ef,Eol d4=+ rlElE E.Eql +t9,4 tlEl E Fr{l= 4e6}zl =46}q, "Je6'}7ll +lolg +9q c*rlzeE^l Ef,E.E eF= (D trtsqlA4(surface passivation) s. d 4 =q El z'l 6}(resistivity)4 dss(conductivit)ts d 4 ="I Azlfl E+EE oJ ql ,r|+ EEI.J+. E+ *A tlql^l olga ql rI + 9E (contami-nation) "i ElqI4 sgql ql6]l^lE Hlz]6}4 dEE= tr+6]-q az} Scql €6"t9 =+. E-E"JASI ql 4tr4"J z)o) tlE1"_lg g= *B"lE, A+d4E(SiNa) fl"-lgE H= EIBE 4*zl* rrt,