105page

3. 웨이퍼의 구분 및 특성
105page

3. 웨이퍼의 구분 및 특성
105page

3. 웨이퍼의 구분 및 특성
105page

gg ^113al ellOlsl =4t 3. ?lloltrlel +E "J =d 71. +llolrlel +E 44 C*B9E q}=qal Waferts =IE'(x, y, il9 ?ldg zl?ge- 6lq Si 44 E CtL "J-J+ Et.Eg €4q r44 4$ t:zB 3-151+ 4"1 E.^loJr+. "J,,J4 o-tr- Bipolar AzI9 4* p-type(111)9 +ll olvlE ^L+6Iq MOS AzI A)Z rlE n-type(100)9 +l olg = ^I+++. [:z? 3-16]elts lzlz]8ol €+ ell olElel +Eql rrl+ Eag +4rrlH+. (a) p-type(111) (b) n-type(l11) (c) p-type(100) (d) n-tYPe(100) reJ 3_1s +1o|tr1ol -dEHofl rrl= +E lne Die(chip) Engineering Teet Die Edge Die (In complete) acvSE l I L Major Flat r= 3-16 +lloltr1 4 +Eel trJa