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152 ^1153 Etl7l= ^1,-.J @ d+4 +4+ Hld+4 +4: rl=rJE.I .rjl.r](Sensor)= zl d A+t)A +46I - d +4 (Contact-type)= 4+, tl+e Er+ Hl d +tlfl ql^.1 +e 6I= Hl d + (Non-contact type)f C *B "l 9.14. d +4 =rJ ee- Ells4 "J 4+ 37lg 4s4 +47)"1 +. "l a g provez| 4l+ql d+Elq +eq= z)ea d+g 4r)l7l ?f rle +dgq +46I- "JB olq, 4 'J s.z} +trI.( + o.ooos [mm]) Hl d +4 EIB ql= *elzl€(^l 4zlz), zl ol z.l B +^I *^1, ^Id+=urB ), HloJt+ z) +(=S+, 4_zl*z)€, xd)FE oJHol gl+. Hl d+4e-l *dg d+4q1 Hl6ll +A*szl uu|=7, 4+459 v}*rlzl, alE+ tl+A E ol z-l + +e +lZ "l +g "} ^i-&6IE ++= d "l rI. E 4=E zlFs} Ct ^l^EJql^.] *4i 4= zlEgE- zlolalzl fl 611^]= *Arl 4t}+ql Ell-J ,Jg= zig+z} "J"I.I a}tsr]l, ol ql HIE^I g,q-J 4ol ,31;._l(Sensor) ol+. cl^lql^] +g + gj= cee= Eilg ++ ,l gil, 4+ 4 €tI, +E -l 7l+ E(qd, zld), .Jq(alrl .Jq, d*S4, 7IS F), Torque(fl{, 4*, 7)* Torque), g(E4, +q,61+ F), Ss1z1 ;1, o4^], _l-;ll), +qL(^4, Hlrj-g, tlrl 5-), Czl(d6, d1i, z]6J, dq, +++), +;l(+=*, oJE, dE),44(Gas F), rlz} Eol glgq, cl ^ .lE 6fe= 7a€, za4E Ell+r+ "J.=E *c-tr-+rl r*e ++e+ olBol zlggr 9leq, zlF+ ^l^'J9 i17i+ "il ^l*q- Cl^l= E+6Itr 4++ ,Jtr+. O +C'JHql E+ E+ : zl$.X|,r.1, =BCIrl @ +4 E]l+ql el 6J E+ : *dlrl, ,,J^Id dl^], 7)Al* dl^.1, 4_,(lz) dl^], g+ . agrl dl^ _], gECl^], +ECl^], ^d+Cl^.i @ e=*B : 944 Cl^], dz}4 dl^1, +E4 dl^1, 4zl q+4 dl^J, trl CEqI 4 d^l @ Za^l EllTlq# : 7=€ dl^.], -=.^d€ cl^-l @ ra=?+E H+ql +216].= €t: tr4 tl^], ++ cl^i, cE dl^.1 @ fdz]]s9 ++: Hls.;] dl^.1, a+ dl^.1, ^rl+Ecl^.], -zBz}(trzl) cl^], sJ: cl^.1, trl ctr dl^-l @ zl+€4 : 5=E€ dl^.], +E€ dl^l @ =e€4 : olBe:z€ dl^.J, 4zl 'J€ CI^J @ EElqlHzl *#EJ4 : 4lHzl E+€ cl^1, qlLlzl 4lq€ cl^.i