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122 ^ll4Af ^Jl EJ E 4l ^H E trI. E, olag tszl_qs E^l4zI €"I41 E6Iq +=al 9ee 9#3 s-4gE 4 olE 'IQUtrI. uf . r.J rJ tr El r1l +tr+ zfl+ql 4 Er;ls+ +aI s-e ^l 4 alJ += 4+ trr S (counter etching) ol 4l 6Iq, ZrE ^lq= H_E td+,t tis++g €"I€ s.Eql drlaJ4. tJ+el trrflzl 4E E4= Bzl E++g v\*"1 ^146Ir, r +lql Es.!= ++elE GS9 s e+ +q,.I4Eg + ++^lzl= E.Jg ++. (t) "I€++ (il *) et 00%) EE€ H} ]l E" 1Oml 3oe 2BOml 300m1 1 ,000m1 (2) "JF"lts+ (il *) qlt (2) EEq *"1 (brunak solution) (71 *) R4+rt(Hr) 48% jg +uEt"JEts(E= +rE4l+EE) . - +t(El6 1.84) ]l rl rf. tafB:rlrll + _EE"l *7)q d+6}q tElqq +49= 7)$ ulzlalzl el6}q $1Eg rlEI Bzl4lE zl ?-l 6J4. (1) rEq *'-4 (cronak solution) (71EJ) 63Et*Ets E. 18e 3ml 1 .000m1 7.5m1 65e 960m1 al. EZt^lEl xlalSl EzJzlE}. zl 4= HlEld+ql e4l "Jzzl E= A+ ulzl;].zl 96lq a+c_oE 6ll+= z)ea oI+El ol. r.* ++q4g +E ^l++tr}.