117page

^11 1tr ==EJ ^1| E 1 09 7l t815{ql BEaJ a+C oIlgEE *z{ql +"J 4ol 91tr+. ol elt ?+"-qe q olats€ (diaxoniumsalt) E.= olzlE (azide) ElEtg EE *zlzJ*z{ (photopolymer) 5 ^l++ zJ*.lol €-*6lq 'J4 ^I+97 914. zl.+orr o zrgz.f 4 ztsz} EA q 44 zI "JA rrl ++41 Fg =4lel *zI s 7 -EIO-1 LE( Cqq 9lr+. 4l+-& a+"-q9 B+++"il= PVA'=+ d+ Fr+ +zEtgsE "J= ,J*41, PSE+++q = .4 4ltltHlH E= olzl r -vB+(azide-nobolac) Al g E gEal \ 4.E(photoresisr) , ,J*4 fzl **ql= ol +tsc (-H6E14) "I=-B e y4 (acrylmonomer)el 54ul (polymer : +.JiI) E= .4 ql :-rl=- fzl e+ E.r=q (trzuri]) FE ++BJ zig =rJEol rl4. vJ++ql= klE z\.rilql . oI4Hl o}r.+ . pvA F4 +zEtg, 4ol =g(wipe- on) **41= q "Ia (diazo) izl , Lll Z € PS++ql= 4 ola fzl 4 .q "l E= E tr =4 "l (photopolymer : ,J*4 fzl ) , g.zl € PS++ql= +g-tr+l gq olzl E (naphthoquinonediazide) EIaJE4 ]'Bq +zl 5gE. 9 = ?oo}"] .l 91trI. u.} -zrlulq++ql= .4alqtBlB algE s.-tr7.il21 iE(phororesist : ']]4"-l) zl 9.t, La{..Jdl++ql= +-zEalg E= 4"I= fzl 4 PVAe+ atHlg qlB €r+el gEL"l o E "J= ?*q4.1 91tr1. r-f . +^l^l al ElEl-d+= +4Eq 9al -S6ll^12 ts"lE Eld+ !-trI *Zl "J=tr}."I€ B++ ,t u|:ull+ B++e et +"l9 r}-$all, 7?-l g++E gglrlole +E+ ^l+ a}_z 914 (1) +4 B+++ +4 al +4 B+++ +4 eIE +tr. gEl,r]"la ++.lg ^l+61q, +4 .lE tE= Tl + +elql^l B4 ol {l6Jqq, #E +elq^l= g4 4l68qrrE +4q49 !_Eil Es. E 40Be'trlE-tr *+q .r|-"tali lol +trI. E, 9s.21 942ttr +4 irty B+ E 4-2 +4Eg E=q +4 ^l7J 30 33 36 4.9 5.4 5.7 6.0 8.6 40 45